The MA6BA6 - Mask aligner from Suss Microtec is used to transfer masks onto substrates coated with photoresist. It is a high resolution contact mask aligner, with sub-micron feature capability in positive tone resists. In addition to the highly accurate top-side alignment capability, it can perform bottom-side alignment with the use of a second alignment microscope, offering superior performance to IR-based systems used elsewhere for backside alignment. The versatile mask holder allows both round and square plates as masks, and the sample plate accommodates small and odd-shaped substrates.
(tool name, manufacturer, model)
- SMTL UPGRADE MASK ALIGNER, SUSS MicroTec, PO449/2012