Picture of Suss E-beam Resist Track
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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Suss Microtec Gamma Cluster - The cluster tracks enable automatic spin coating and develop process of up to 200 mm wafers for multi-layer and thick resist coating. There are two separate tracks, one for optical resist and a second one for electronbeam resists. Both systems include a submicron Coater module with pivoting dispense arm, top and bottom EBR, puddle and spray development chamber, programmable exhaust flow controller, temperature controlled lines, and drain full sensor. These systems are capable of processing up to 25 wafers in one batch.

Tool name:
Suss E-beam Resist Track
Area/room:
01.01. Cleanroom
Manufacturer:
Suss Microtec
Model:
Gamma Cluster
Booking type:
Optional

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Licensed Users

Micro and Nanofabrication
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