Picture of Roth & Rau Thermal CVD (800ºC)
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Group:
29_Microfabrication and Exploratory Nanotechnology
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A dedicated CVD equipment for carbon nanotube growth on wafers with process flexibility to grow various aspect ratios for applications such as field emission sources, bio sensors and microfluidics among others.This Nanoscale Growth System delivers high performance growth of nanotubes and nanowires with in-situ catalyst activation and rigorous process control with flexible temperature up to 700°C.

Tool name:
Roth & Rau Thermal CVD (800ºC)
Area/room:
01.01. Cleanroom
Manufacturer:
Roth and Rau Microsystems
Model:
MicroSys 400
Booking type:
Compulsory

Instructors

Licensed Users

Micro and Nanofabrication
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