The KLA - Tencor P-16 Surface Profiler provides leading edge surface measurement and analysis performance capability. Some of the key features of the P-16 are as follows:
•  Vertical range 0-327 µm
•  2 µm diamond stylus
•  Substrates sizes from 1"x 1" up to 8" in diameter
•  Maximum substrate thickness of 3 mm.
•  Maximum scan length of 80 mm.
•  2D scans
•  Dual view optics
•  Sequence scanning
•  Black and White camera
•  Stress measure
•  Motorized level and rotation
•  Vacuum hold down