Picture of Contact Profilometer
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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The KLA - Tencor P-16 Surface Profiler provides leading edge surface measurement and analysis performance capability. Some of the key features of the P-16 are as follows:
•  Vertical range 0-327 µm
•  2 µm diamond stylus
•  Substrates sizes from 1"x 1" up to 8" in diameter
•  Maximum substrate thickness of 3 mm.
•  Maximum scan length of 80 mm.
•  2D scans
•  Dual view optics
•  Sequence scanning
•  Black and White camera
•  Stress measure
•  Motorized level and rotation
•  Vacuum hold down

 

Tool name:
Contact Profilometer
Area/room:
01.01. Cleanroom
Manufacturer:
KLA Tencor
Model:
P-16+
Booking type:
Optional

Instructors

Licensed Users

Micro and Nanofabrication
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