Picture of Sheet Resistance Measurement System
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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The Sheet Resistance/Resistivity Measurement System provides leading edge surface measurement and analysis performance capability. Some of the key features of the four point resistivity mapper are as follows:

•  X, Y, Z  axis full automatic system
•  Automatic and manual measurement range selection
•  Up to 200 mm wafer or 140x140 mm square sample capability
•  Perfect remote control by exclusive operating software
•  Data  analysis function 2D, 3D, Data map...
•  ASTM, SEMI, measurement mode.
 

Tool name:
Sheet Resistance Measurement System
Area/room:
01.01. Cleanroom
Manufacturer:
AITCO
Model:
CMT-SR2000N
Booking type:
Optional

Instructors

Licensed Users

Micro and Nanofabrication
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