The manual optical microscope is an inspection and metrology tool used to acquire high resolution images and measure critical dimensions for process and product monitoring. It accomodates substrate of different sizes up to 8'' diameter wafers. It is equipped with a motorized nosepiece with software control, 5 objectives (5X, 10X. 20X, 50X and 100X) with a 60 mm parfocal distance and a digital camera.