The Manual coater + Hotplates cluster is used for coating and developing substrates with different type of chemistry. It is composed of a programable spin coater that can store and execute up to 30 programs with 20 process steps each. A set of chucks from 20mm to 280mm allows processing samples up to 300mm in diameter. Bake processes can be handled on two separate hotplates with 2 different temperature setups.