Picture of Manual Coater 200mm + Hotplate
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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The Manual coater + Hotplates cluster is used for coating and developing substrates with different type of chemistry. It is composed of a programable spin coater that can store and execute up to 30 programs with 20 process steps each. A set of chucks from 20mm to 280mm allows processing samples up to 300mm in diameter. Bake processes can be handled on two separate hotplates with 2 different temperature setups.

Tool name:
Manual Coater 200mm + Hotplate
Area/room:
01.01. Cleanroom
Manufacturer:
SCS/EMS
Model:
G3P-15
Booking type:
Compulsory

Instructors

Licensed Users

Micro and Nanofabrication
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