Picture of Optical Microscope - Motorized
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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The motorized optical microscope is an inspection and metrology tool used to acquire high resolution images and measure critical dimensions for process and product monitoring. It accomodates substrate of different sizes up to 8'' diameter wafers. It is equipped with a motorized nosepiece with software control, 6 objectives (1X, 5X, 10X. 20X, 50X and 100X) with a 60 mm parfocal distance, a digital camera and motorized stage with software control.

 

Tool name:
Optical Microscope - Motorized
Area/room:
01.01. Cleanroom
Manufacturer:
Nikon
Model:
Eclipse L200N
Booking type:
Optional

Instructors

Licensed Users

Micro and Nanofabrication
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