Picture of Vapour Prime Oven
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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Vapor Prime Oven YES-310TA - This sytem is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafer with HMDS (hexamethyldisilizane) in order to improve photoresist adhension. It can also perform image reversal via NH3. The large oven chamber can easily accomodate anything from a piece to a batch of wafers.

Tool name:
Vapour Prime Oven
Area/room:
01.01. Cleanroom
Manufacturer:
YES
Model:
310TA
Booking type:
Optional

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Licensed Users

Micro and Nanofabrication
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