Picture of Automated Wafer Probe Station 200mm
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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This probe station presents a travel range of 200mm both in x and y, and 50mm in height, and allows positioning of several pairs of probe needles. The sample platform position and a wide range of electronic characterization equipment are controlled by a dedicated software application. It can thus be used for automated full wafer optical inspection and electrical characterization.

Tool name:
Automated Wafer Probe Station 200mm
Area/room:
01.18. MEMS Lab
Manufacturer:
Thorlabs
Model:
custom
Booking type:
Optional

Instructors

Licensed Users

Micro and Nanofabrication
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