Picture of Leguan-Thin film Silicon CVD system
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Group:
23_2D Materials and Devices
You must be logged in to view files.
Tool name:
Leguan-Thin film Silicon CVD system
Area/room:
01.01. Cleanroom
Manufacturer:
Leguan
Model:
Leguan
Booking type:
Optional

Instructors

Licensed Users

Micro and Nanofabrication
You must be logged in to view tool modes.