Picture of TMAH / KOH Si Etch
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Joana Santos
2nd Responsible:
José Fernandes
Group:
29_Microfabrication and Exploratory Nanotechnology
Files
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Description

Wet process tank for Silicon etch with TMAH up to 8" wafers with temperature control.

Details
Tool name:
TMAH / KOH Si Etch
Area/room:
01.01. Cleanroom
Manufacturer:
A.M.M.T.
Model:
AMMT
Booking
Booking type:
Optional
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication
Tool Modes
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