Picture of Spectroscopic Ellipsometer
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Group:
10_Nanophotonics Flagship Facility
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The J.A. Wollam M-2000 spectroscopic ellipsometer is engineered to meet the diverse demands of thin film characterization. It is an advanced optical design, wide spectral range, and fast data acquisition combined in an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy. Its patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 covers everything from in-situ monitoring and process control to large-area uniformity mapping and general purpose thin film characterization.

The horizontal M-2000 system offers wide range of options like large area mapping, liquid cells, and heat stages. It is deal for general use and large samples. The maximum substrate thickness is 18 mm.

Tool name:
Spectroscopic Ellipsometer
Area/room:
12.00. Optical spectroscopy and analysis
Manufacturer:
Woollam
Model:
M2000
Booking type:
Compulsory

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Nanophotonics and Bioimaging User Facility
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