Picture of SPTS Omega - Metal Etcher
Current status:
WARNING
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1st Responsible:
2nd Responsible:
Group:
29_Microfabrication and Exploratory Nanotechnology
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Tool name:
SPTS Omega - Metal Etcher
Area/room:
01.01. Cleanroom
Manufacturer:
SPTS
Model:
Omega C2L
Booking type:
Compulsory

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