Picture of Ultra-HF Scan. Laser Vibrometer POLYTEC UHF 120
Current status:
AVAILABLE
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Group:
29_Microfabrication and Exploratory Nanotechnology
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Polytec’s UHF-120 is an optical measurement tool for MEMS displacement. It is a Laser-Doppler Vibrometer which can characterize out-of-plane vibrations at ultra high frequencies (frequency bandwidth up to 1.2 GHz). The equipment consists of a heterodyne interferometer with a controller box and includes an integrated camera and bright-field microscope illumination for measurement spot positioning. Applications are for instance RF MEMS, BAW/SAW filters and NEMS.

Further information: http://www.polytec.com/us/products/vibration-sensors/microscope-based-systems/uhf-120-ultra-high-frequency-vibrometer/

Tool name:
Ultra-HF Scan. Laser Vibrometer POLYTEC UHF 120
Area/room:
01.18. MEMS Lab
Manufacturer:
Polytec
Model:
UHF 120
Booking type:
Optional

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Licensed Users

Micro and Nanofabrication
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