Polytec’s UHF-120 is an optical measurement tool for MEMS displacement. It is a Laser-Doppler Vibrometer which can characterize out-of-plane vibrations at ultra high frequencies (frequency bandwidth up to 1.2 GHz). The equipment consists of a heterodyne interferometer with a controller box and includes an integrated camera and bright-field microscope illumination for measurement spot positioning. Applications are for instance RF MEMS, BAW/SAW filters and NEMS.
Further information: http://www.polytec.com/us/products/vibration-sensors/microscope-based-systems/uhf-120-ultra-high-frequency-vibrometer/