Picture of Suss MA6 BA6 Mask Aligner
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AVAILABLE
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Group:
09_Micro and Nanofabrication Facility
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The MA6BA6 - Mask aligner from Suss Microtec is used to transfer masks onto substrates coated with photoresist. It is a high resolution contact mask aligner, with sub-micron feature capability in positive tone resists. In addition to the highly accurate top-side alignment capability, it can perform bottom-side alignment with the use of a second alignment microscope, offering superior performance to IR-based systems used elsewhere for backside alignment. The versatile mask holder allows both round and square plates as masks, and the sample plate accommodates small and odd-shaped substrates.

 

includes:

(tool name, manufacturer, model)

- SMTL UPGRADE MASK ALIGNER, SUSS MicroTec, PO449/2012

Tool name:
Suss MA6 BA6 Mask Aligner
Area/room:
01.01. Cleanroom
Manufacturer:
Suss Microtec
Model:
MA6BA6
Booking type:
Compulsory

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Licensed Users

Micro and Nanofabrication Facility
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