The KLA - Tencor P-16 Surface Profiler provides leading edge surface measurement and analysis performance capability. Some of the key features of the P-16 are as follows:
• Vertical range 0-327 µm
• 2 µm diamond stylus
• Substrates sizes from 1"x 1" up to 8" in diameter
• Maximum substrate thickness of 3 mm.
• Maximum scan length of 80 mm.
• 2D scans
• Dual view optics
• Sequence scanning
• Black and White camera
• Stress measure
• Motorized level and rotation
• Vacuum hold down