The Sheet Resistance/Resistivity Measurement System provides leading edge surface measurement and analysis performance capability. Some of the key features of the four point resistivity mapper are as follows:
• X, Y, Z axis full automatic system
• Automatic and manual measurement range selection
• Up to 200 mm wafer or 140x140 mm square sample capability
• Perfect remote control by exclusive operating software
• Data analysis function 2D, 3D, Data map...
• ASTM, SEMI, measurement mode.