The Sheet Resistance/Resistivity Measurement System provides leading edge surface measurement and analysis performance capability. Some of the key features of the four point resistivity mapper are as follows:

•  X, Y, Z  axis full automatic system
•  Automatic and manual measurement range selection
•  Up to 200 mm wafer or 140x140 mm square sample capability
•  Perfect remote control by exclusive operating software
•  Data  analysis function 2D, 3D, Data map...
•  ASTM, SEMI, measurement mode.