Picture of MNF_Vapour Prime Oven
Current status:
AVAILABLE
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1st Responsible:
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Group:
09_Micro and Nanofabrication Facility
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Vapor Prime Oven YES-310TA - This sytem is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafer with HMDS (hexamethyldisilizane) in order to improve photoresist adhension. It can also perform image reversal via NH3. The large oven chamber can easily accomodate anything from a piece to a batch of wafers.

Tool name:
MNF_Vapour Prime Oven
Area/room:
01.01. Cleanroom
Manufacturer:
YES
Model:
310TA
Booking type:
Optional

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Micro and Nanofabrication Facility
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