Picture of Automated Wafer Probe Station 200mm
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Marco Martins
2nd Responsible:
Group:
29_Integrated Micro and Nanotechnologies
Files
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Description

Includes:

(tool name; manufacturer; model)

- DIRECT DRIVE STAGE 220mm TRAVEL-METRIC; Thorlabs ; MQ038908-1

- Faraday Enclosure 900 X 750; Thorlabs GmbH; FAR01

- Motorized Lab Jack 2" Travel Metric; Thorlabs ; MQ039191-1

- Nikon Microscope SMZ1000 including; Izasa - Distribuições Técnicas; 32132140

- OPTICAL BREADBOARD 900x750x61; Thorlabs GmbH; OPTICAL TABLE ISOLATOR

Details
Tool name:
Automated Wafer Probe Station 200mm
Area/room:
01.18. MEMS Lab
Manufacturer:
Thorlabs
Model:
Custom
Booking
Booking type:
Optional
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication Facility
Tool Modes
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