Picture of MNF_Manual Wafer Probe Station
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
09_Micro and Nanofabrication Facility
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This probe station presents a travel range of 200mm both in x and y, and 50mm in height, and allows positioning of several pairs of probe needles. The sample platform position and a wide range of electronic characterization equipment are controlled by a dedicated software application. It can thus be used for automated full wafer optical inspection and electrical characterization.

Tool name:
MNF_Manual Wafer Probe Station
Area/room:
01.01. Cleanroom
Manufacturer:
Thorlabs
Model:
custom
Booking type:
Compulsory

Instructors

Licensed Users

Micro and Nanofabrication Facility
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