Picture of MNF_TMAH / KOH Si Etch
Current status:
AVAILABLE
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Responsibles
1st Responsible:
José Rodrigues
2nd Responsible:
Tiago Oliveira
Group:
09_Micro and Nanofabrication Facility
Files
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Description

Wet process tank for Silicon etch with TMAH up to 8" wafers with temperature control.

Details
Tool name:
MNF_TMAH / KOH Si Etch
Area/room:
01.01. Cleanroom
Manufacturer:
A.M.M.T.
Model:
AMMT
Booking
Booking type:
Compulsory
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication Facility
Tool Modes
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