Picture of TMAH / KOH Si Etch
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
José Rodrigues
2nd Responsible:
José Fernandes
Group:
09_Micro and Nanofabrication Facility
Files
You must be logged in to view files.
Description

Wet process tank for Silicon etch with TMAH up to 8" wafers with temperature control.

Details
Tool name:
TMAH / KOH Si Etch
Area/room:
01.01. Cleanroom
Manufacturer:
A.M.M.T.
Model:
AMMT
Booking
Booking type:
Compulsory
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication Facility
Tool Modes
You must be logged in to view tool modes.