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11_AEMIS User Facility: Advanced Electron Microscopy, Imaging and Spectroscopy
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FEI Titan Cubed Themis 60-300 kV – Double corrected

FEI Titan (G3) Cubed Themis 60-300 kV, with Probe and Image Cs corrector - Titan Cubed Themis is the state-of-the-art, 60-300 kV Monochromated X-FEG Scanning Transmission Electron Microscope of the Titan G3 family with TEM, STEM and EELS modes.

Cs Double Corrector DCOR - Cs DCOR Probe Corrector and Cs Image Corrector. Cs probe corrector, using dodecapole elements, allows aberration correction up to the 4th order and optimization of the 5th order. Cs Image corrector allows an accurate measurement of the aberrations from the objective lens system by the use of Zemlin Tableau method.

STEM: BF and DF images can be acquired simultaneously together with the HAADF image. Apart from HAADF detector, STEM mode has 1x bright field (BF) detector and 2x dark field (DF2 and DF4) detectors (for ABF and ADF). These imaging modes allow to control their annular detection ranges.

DPC - Differential Phase contrast (DPC) imaging.

Super-X EDX System: The integration of four windowless Silicon Drift Detector (SDD) symmetrically placed around the sample offering 0.7 srad collection angle and 120 mm2 detector size provides the ideal EDX detector for use with FEI’s DCOR probe corrector. The collection time for STEM/EDX elemental maps in fast mapping mode is decreased significantly and the detection sensitivity for light elements as well as low concentrations is greatly enhanced, thus providing superior sensitivity and unrivaled speed in EDX analysis and fast EDX mapping.

EELS: Gatan Energy Filter, Enfinium ER/977 with Ultrafast Dual EELS (Fast shutter) – 1000 spectra/second. The possibility of simultaneous measurement of the Zero-loss peak (ZLP) and Core Loss (CL) EELS spectrum. Digiscan controller for Spectrum-Imaging (STEM-EELS) using Digital Micrograph software.

FEI Ceta 16-megapixel CMOS camera (4096 x 4096 pixels) – Frame rate: 1 fps (Full-frame acquisition - 4k x 4k).

Fluorescent screen with a real-time monitoring system for remote operation (Flucam). High frame rate up to 40 fps.

NanoEx-i/v MEMS holder for heating (up to 1000 - 1200 ºC) and biasing experiments in-situ, allowing S/TEM imaging and elemental analysis.

Ultra-stable piezoelectric stage for fine sample positioning (step sizes down to 20 pm). Stability better than 0.5 nm/min.

Lorentz lens for Corrected Lorentz microscopy.

Biprism for Electron Holography.

Low-dose Exposure Technique.

Focus Series Reconstruction.


Main specifications:

  • AC-TEM information limit ≤ 63 pm at 300 kV
  • AC-STEM information limit ≤ 63 pm at 300 kV
  • Probe corrected STEM resolution ≤ 0.063 nm (300 kV)
  • Super X energy resolution ≤ 136 eV – 140 eV
  • Alpha tilt: ±35° (a special holder is available which allows for a tilt of ±70°)
  • Energy filter: GIF Enfinium ER/977 – Energy spread: 0.19 eV (60 kV)
  • XFEG Brightness ≥ 7 · 107 A/m2 sr V
  • C1 apertures: 2000 um/50 um/Slits/Wedges/Holes
  • C2 apertures: 150/100/70/50 um
  • C3 apertures: 2000/150/50/30 um
  • Objective apertures: 100/70/60/50/40/30/20/10 um
  • SA apertures: 40 um/10 um/Biprism

Installation: June 2015

Tool name:
Double Corrected HRTEM - Titan Themis 60-300 kV
04.00. High Accuracy Labs
Titan G3 Cubed Themis 60-300 kV
Booking type:


Licensed Users

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