Picture of MNF_SPTS C2L ICP - Metal Etcher
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Group:
09_Micro and Nanofabrication Facility
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Tool name:
MNF_SPTS C2L ICP - Metal Etcher
Area/room:
01.01. Cleanroom
Manufacturer:
SPTS
Model:
Omega C2L
Booking type:
Compulsory

Instructors

Licensed Users

Micro and Nanofabrication Facility
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