Picture of MNF_SUSS MA/BA8 Gen4Pro Mask Aligner
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Paulo Coelho
2nd Responsible:
José Rodrigues
Group:
09_Micro and Nanofabrication Facility
Files
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Description
Details
Tool name:
MNF_SUSS MA/BA8 Gen4Pro Mask Aligner
Area/room:
01.01. Cleanroom
Manufacturer:
Suss Microtec
Model:
MA/BA8
Booking
Booking type:
Compulsory
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication Facility
Tool Modes
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