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SUSS MA/BA8 Gen4Pro Mask Aligner (00000080)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Cosimo Spagnolo
2nd Responsible:
José Rodrigues
Group:
09_Micro and Nanofabrication Facility
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Description
Details
Tool name:
SUSS MA/BA8 Gen4Pro Mask Aligner
Area/room:
01.01. Cleanroom
Manufacturer:
Suss Microtec
Model:
MA/BA8
Booking
Booking type:
Compulsory
Instructors & Licensed Users
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Licensed Users
Process Lines
Micro and Nanofabrication Facility
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