Picture of SUSS MA/BA8 Gen4Pro Mask Aligner
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Cosimo Spagnolo
2nd Responsible:
José Rodrigues
Group:
09_Micro and Nanofabrication Facility
Files
You must be logged in to view files.
Description
Details
Tool name:
SUSS MA/BA8 Gen4Pro Mask Aligner
Area/room:
01.01. Cleanroom
Manufacturer:
Suss Microtec
Model:
MA/BA8
Booking
Booking type:
Compulsory
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Micro and Nanofabrication Facility
Tool Modes
You must be logged in to view tool modes.