Picture of NBI - Spectroscopic Imaging Ellipsometer
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Adelaide Miranda
2nd Responsible:
Mariana Carvalho
Group:
10_Nanophotonics Flagship Facility
Files
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Description
 
The Accurion nanofilm_ep4 imaging ellipsometer is a new generation of microscopic thin film, surface and materials metrology tool that combines auto nulling ellipsometry and microscopy to enable surface characterization with lateral resolution as small as 1 micron. This enables resolving sample areas 1000 times smaller than most non-imaging ellipsometers, even if they use micro spot spectroscopic option. 
The nanofilm_ep4 uses a variety of unique features that allow the visualization of your surface in real time. You will see the structure of your sample on a microscopic scale and measure parameters like thickness, refractive index and absorption. 3D profile maps of selected areas can be recorded. Instrument combinations with other technologies like AFM, QCM-D, reflectometry, Raman spectroscopy, etc. are possible to receive even more information from your samples.
 
The Accurion nanofilm_ep4 spectral imaging ellipsometer for localized measurements of the optical properties of thin films and devices.
 
Details
Tool name:
NBI - Spectroscopic Imaging Ellipsometer
Area/room:
12.00. Optical spectroscopy and analysis
Manufacturer:
Accurion
Model:
Nanofilm_ep3_se + upgrade
Booking
Booking type:
Compulsory
Process info

Before applying for a license, make sure that:

1- Your supervisor approved the training (we need an email or confirmation).
2- Do you have something prepared to explain why is this tool needed and how urgent is the training and required use?
3- Can you provide us with a summary of your experiment and why this tool is important? (one or two PPT or PDF pages with a schematic of the experiment would be enough). 

Please provide this information as soon as you require for a license.

Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Nanophotonics and Bioimaging User Facility
Tool Modes
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